Fabrication instruments

Electronic devices fabricated within the ELORGA and TAMIS platforms consist of layered thin films of various materials (i.e. metals, semiconductors and insulators). The deposition of these layers are made by solution process, printing technologies or vacuum evaporators. Fabrication equipments available in our laboratory are:

  • Screen-printer
  • Inkjet printer
  • Spray coater
  • Doctor blading coater
  • Xurography
  • Spin coater
  • Thermal evaporator
  • e-beam evaporator
  • Photolithography
  • Physical Vapor Transport (PVT)
  • Vacuum over
  • UV Ozone Treatment

Characterization instruments

Thickness and imaging instruments are used to verify the structure of the fabricated devices. Then, the electrical and optical properties are measured to characterize the performances of our organic electronic and microsystems devices. Characterization equipments available in our laboratory are:

  • EQE measurement set up
  • UV-Vis spectrometer
  • Fluorescence spectrometer
  • Solar simulator
  • Atomic Force Microscope (AFM)
  • Scanning Electron Microscope (SEM)
  • Optical microscope
  • Mechanical profilometer
  • Optical profilometer
  • Semiconductor analyzer
  • Laser vibrometer
  • Gain-phase analyzer
  • Probes station
  • 4 probes Conductivity
  • Charge extraction by linear increasing voltage (CELIV)
  • Kelvin probe